C07900 - SEMI C79 - Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems Revision:SEMI C79-0113 - Superseded To define the specification and

To define the specification and analytical methods and validate the specifications for diborane mixtures

NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use

This Guide addresses universal alignment mark

The seal between the tube and the welded fitting and between the welded fitting and the welded fitting is within the scope of this Document

SEMI C24-0813 (technical revision)

C07900 - SEMI C79 - Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems Revision:SEMI C79-0113 - Superseded To define the specification andThis Document is a recommended guide to evaluate the efficacy of filter elements used in ultrapure water (UPW) fluid streams, providing particle control as risk mitigation for particle contamination on the wafer. Due to the lack of adequate on line particle detection metrology at the particle sizes addressed by this Guide, however off line filter performance testing can be used to validate filter retention efficiency. Off line filter performance