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NOTICE: This document is no longer published with the SEMI E54 suite of standards
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In view of the uncertainty of precisely locating the intersection of the contour and the wafer surface when carrying out Method B
This Specification defines standards that facilitate the host’s knowledge and role in automated and manual reticle pod transfers
Additional requirements on the material to be tested are listed in SEMI MF1810
E11700 - SEMI E117 - レチクルロードポートの仕様 StdVol-Safety Guidelines NOTICE: This document is noglobal Physical Interfaces and Carriers Committee2010430global Audits and Reviews Subcommittee20106www. semi. org200211200411 RSP Referenced SEMI Standards SEMI E15 Specification for Tool Load Port SEMI E15. 1 Specification for 300 mm Tool Load Port SEMI E19. 3 Standard Mechanical Interface (SMIF), Specification for 150 mm (6 inch) Port SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF) SEMI E72 Specification and Guide for 300 mm Equipment