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The test methods described can be used to demonstrate the effectiveness of the static control methods
SEMI D62-0619 (Reapproved 1224)
It was formally approved by ASTM balloting procedures and adhered to ASTM patent requirements
SEMI F27 — Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS)
The purpose of this Document is to provide a series of specifications for different grades of hydrogen (H2) that are used in the semiconductor industry
M03400 - SEMI M34 - SIMOXウェーハを規定するための指針 Revision:SEMI M34-0299 - Superseded The test methods described can0. 5 mSIMOXSIMOX SOI Referenced SEMI Standards SEMI M1 Specifications for Polished Monocrystalline Silicon Wafers SEMI M22 Specification for Dielectrically Isolated (DI) Wafers