F09500 - SEMI F95 - Specification for Dimension of Three Port Components for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems StdTpc-FPD Polarizing Films polished or unpolished

polished or unpolished

ロボティックハンドリングフランジ（オプション）　（4）

corresponding to particular means of transportation are chosen by the user according to existing standards (e

エッジグリップハンドリングデバイスを使用したウェーハへのランダムアクセスは，本スタンダードの要求事項ではない。

This Standard specifies the tool side of the mechanical interface between the main part of a process or metrology tool and the component that opens boxes and presents the boxes to the tool wafer handler for unloading and loading 300 mm wafers

F09500 - SEMI F95 - Specification for Dimension of Three Port Components for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems StdTpc-FPD Polarizing Films polished or unpolishedThis Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www. semiviews. org and www. semi. org in October 2012; originally published March 2004; previously published March 2012. This Standard establishes the properties and physical of two port components for 1. 5 inch type surface mount gas distribution