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本安全指導方針在SEMI S2所涵蓋的一般範圍外，提供額外指示予承載埠與晶圓搬運裝卸機器人製造商。
The purpose of this document is to provide a standardized methodology and detailed procedure for measuring the contamination performance of a particular process or tool in terms of the number and size distribution of particles added to a silicon wafer as a result of having been passed through that process tool
and equipment and process development activities
the proposed qualification would be helpful to refer to in similar low light application like OPV/DSSC/PSC
SEMI E134-1224 (technical revision)
S02700 - SEMI S27 - 針對環境、安全與衛生(ESH)評估報告內容之安全指導方針 Revision:SEMI S27-0310 - Inactive 本安全指導方針在SEMI S2所涵蓋的一般範圍外，提供額外指示予承載埠與晶圓搬運裝卸機器人製造商。(Environmental Health & Safety Technical Committee)2009121620102www. semi. org SEMI(ME) SEMI Referenced SEMI Standards SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S7 Safety Guideline for Evaluation Personnel and Evaluating Company Qualifications SEMI S8 Safety Guidelines for Ergonomics Engineering of Semiconduct
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