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This Guide provides the user with information about containers needed to ship thin wafers that are mounted on dicing tape to tape frames conforming to either SEMI G74 or SEMI G87
SEMI C1 — Guide for the Analysis of Liquid Chemicals
Subassemblies
26-84 (first published)
- The maximum diameter of a nominal 300 mm wafer is 301 mm
C00320 - SEMI C3.20 - Specification for Helium (He), in Cylinders, 99.9995% StdPbc-0519 This Guide provides the userThe purpose of this Document is to provide specifications for helium (He) that is used in the semiconductor industry. This Document covers requirements for helium used in the semiconductor industry. Referenced SEMI Standards SEMI C3 Specification for Gases
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