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The method described is destructive in nature but is more widely applicable than the alternative infrared method
The object services defined in this Document may be included in the services provided by other Standards
34-90 (technical revision)
本スタンダードは，global Information and Control Committeeで技術的に承認されている。現版は2011年9月12日，global Audits and Reviews Subcommitteeにて発行が承認された。2011年11月にwww
Equipment Communication Standards1 Messages Transfer (SECS-I) or the protocol defined in SEMI E37
M02100 - SEMI M21 - Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array StdTpc-LCD Backlight Unit The method described is destructiveIt is frequently very useful to have a standardized method for labeling elements in an array on a silicon wafer surface. This Guide defines an element addressing convention for locating and uniquely identifying rectangular elements in a Cartesian array. Such arrays are useful in locating sites for site flatness characterization, defect mapping, determination of parametric distributions, etc. on unpatterned semiconductor wafers. This Guide covers