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APL values of various images
Semiconductor processing equipment includes equipment intended for wafer manufacturing
SEMI E132-1108 (technical revision)
SEMI C27-0918 (technical revision)
SEMI E49-0702 (technical revision)
F09700 - SEMI F97 - Specification for Facility Package Integration, Monitoring and Control Revision:SEMI F97-0305 - Inactive APL values of various imagesNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to provide the requirements for the architecture, functionality and interfaces for facility monitoring and control systems (FMCS) and the various facility package units (FPU) to enable a