E19001 - SEMI E190.1 - Specification for Common Data for Etch Components StdPbc-0821 SEMI M35-0299E (editorial revision)

SEMI M35-0299E (editorial revision)

up to and including an internal volume of 1000 liters

特定のフォーマットやプロトコルの実装は，その適用する技術に依存して，本規定のサブドキュメントの｢ドット｣規定に記述する。想定し得るフォーマットの例としてXMLがある（データ型の定義やメタモデルのスキーマも含まれる）。

which provides a unified standard for the manufacture

• Reduction of operator efforts required to maintain consistency of recipes in equipment with recipes in Recipe Server by providing an automated consistency maintenance mechanism based on cache

E19001 - SEMI E190.1 - Specification for Common Data for Etch Components StdPbc-0821 SEMI M35-0299E (editorial revision)NOTICE: By purchasing this download, you will receive the Primary Standard, SEMI E191 and the Subordinate Standard, SEMI E191. 1. If you purchase this download, you do not need to purchase the SEMI E191 download. 1 Purpose 1. 1 This Specification provides an implementation mapping of SEMI E190 Equipment Data Publication (EDP) Level Categories to Etch Components. 2 Scope 2. 1 This Specification is the faithful representation of level categories with